Mobility reduction and reliability assessment of high-k/metal gate stacks in deep sub-nanometer EOT region.

Details

Language :

English

ISBNs :

9781424443512

Database :

Complementary Index

Journal :

2009 Proceedings of the European Solid State Device Research Conference

Publication Type :

Conference

Accession number :

81544134

Full Text :

https://doi.org/10.1109/ESSDERC.2009.5331522