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Strain evaluation for thin strained-Si on SGOI and strained-Si on nothing (SSON) structures using nano-beam electron diffraction (NBD).
- Source :
- IEEE International SOI Conference, 2003; 2003, p138-139, 2p
- Publication Year :
- 2003
Details
- Language :
- English
- ISBNs :
- 9780780378155
- Database :
- Complementary Index
- Journal :
- IEEE International SOI Conference, 2003
- Publication Type :
- Conference
- Accession number :
- 81664926
- Full Text :
- https://doi.org/10.1109/SOI.2003.1242928