Back to Search Start Over

Control of nitrogen reactive species in helicon plasmas for III-N semiconductor growth.

Authors :
Biloiu, C.
Scime, E.
Doss, F.
Biloiu, I.A.
Source :
31st IEEE International Conference on Plasma Science, 2004. ICOPS 2004. IEEE Conference Record - Abstracts; 2004, p239-239, 1p
Publication Year :
2004

Details

Language :
English
ISBNs :
9780780383340
Database :
Complementary Index
Journal :
31st IEEE International Conference on Plasma Science, 2004. ICOPS 2004. IEEE Conference Record - Abstracts
Publication Type :
Conference
Accession number :
81668503
Full Text :
https://doi.org/10.1109/PLASMA.2004.1339859
Full Text Access
View/download PDF

Tools

Authors Abstract Subjects Details