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A new MEMS optimal design method using CASE.

Authors :
Mamiya, H.
Ishikawa, K.
Qiang Yu
Source :
Ninth Intersociety Conference on Thermal & Thermomechanical Phenomena In Electronic Systems (IEEE Cat. No.04CH37543); 2004, p529-529, 1p
Publication Year :
2004

Details

Language :
English
ISBNs :
9780780383579
Database :
Complementary Index
Journal :
Ninth Intersociety Conference on Thermal & Thermomechanical Phenomena In Electronic Systems (IEEE Cat. No.04CH37543)
Publication Type :
Conference
Accession number :
81888336
Full Text :
https://doi.org/10.1109/ITHERM.2004.1318329