Fabrication of an active nanostencil with integrated microshutters.

Authors :: Tjerkstra, R.W.
Ekkels, P.
Krijnen, G.
Egger, S.
Berenschot, E.
Ma, K.C.
Brugger, J.
Source :: TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators & Microsystems. Digest of Technical Papers (Cat. No.03TH8664); 2003, p1651-1651, 1p
Publication Year :: 2003

Language :: English
ISBNs :: 9780780377318
Database :: Complementary Index
Journal :: TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators & Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
Publication Type :: Conference
Accession number :: 81891431
Full Text :: https://doi.org/10.1109/SENSOR.2003.1217099