A 5-volt operated MEMS variable optical attenuator.

Authors :: Toshiyoshi, H.
Isamoto, K.
Morosawa, A.
Tei, M.
Fujita, H.
Source :: TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators & Microsystems. Digest of Technical Papers (Cat. No.03TH8664); 2003, p1768-1768, 1p
Publication Year :: 2003

Language :: English
ISBNs :: 9780780377318
Database :: Complementary Index
Journal :: TRANSDUCERS '03. 12th International Conference on Solid-State Sensors, Actuators & Microsystems. Digest of Technical Papers (Cat. No.03TH8664)
Publication Type :: Conference
Accession number :: 81891460
Full Text :: https://doi.org/10.1109/SENSOR.2003.1217128