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Silicon nitride layers made by EBEP and their application to a-Si TFTs.
- Source :
- 2000 International Semiconductor Conference. 23rd Edition. CAS 2000 Proceedings (Cat. No.00TH8486); 2000, p355-355, 1p
- Publication Year :
- 2000
Details
- Language :
- English
- ISBNs :
- 9780780358850
- Database :
- Complementary Index
- Journal :
- 2000 International Semiconductor Conference. 23rd Edition. CAS 2000 Proceedings (Cat. No.00TH8486)
- Publication Type :
- Conference
- Accession number :
- 81902808
- Full Text :
- https://doi.org/10.1109/SMICND.2000.890253