Vibration mode analysis of RF film bulk acoustic wave resonator using finite element method.

Details

Language :

English

ISBNs :

9780780371774

Database :

Complementary Index

Journal :

2001 IEEE Ultrasonics Symposium. Proceedings An International Symposium (Cat. No.01CH37263)

Publication Type :

Conference

Accession number :

81908621

Full Text :

https://doi.org/10.1109/ULTSYM.2001.991852