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Microstructure of Si/SiO2 nanocomposite films.
- Source :
- 2004 International Semiconductor Conference. CAS 2004 Proceedings (IEEE Cat. No.04TH8748); 2004, p62-62, 1p
- Publication Year :
- 2004
Details
- Language :
- English
- ISBNs :
- 9780780384996
- Database :
- Complementary Index
- Journal :
- 2004 International Semiconductor Conference. CAS 2004 Proceedings (IEEE Cat. No.04TH8748)
- Publication Type :
- Conference
- Accession number :
- 81932865
- Full Text :
- https://doi.org/10.1109/SMICND.2004.1402802