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Microstructure of Si/SiO2 nanocomposite films.

Authors :
Teodorescu, V.S.
Ciurea, M.L.
Iancu, V.
Blanchin, M.G.
Source :
2004 International Semiconductor Conference. CAS 2004 Proceedings (IEEE Cat. No.04TH8748); 2004, p62-62, 1p
Publication Year :
2004

Details

Language :
English
ISBNs :
9780780384996
Database :
Complementary Index
Journal :
2004 International Semiconductor Conference. CAS 2004 Proceedings (IEEE Cat. No.04TH8748)
Publication Type :
Conference
Accession number :
81932865
Full Text :
https://doi.org/10.1109/SMICND.2004.1402802