Back to Search Start Over

Scanning transmission electron microscopy strain measurement from millisecond frames of a direct electron charge coupled device.

Authors :
Müller, Knut
Ryll, Henning
Ordavo, Ivan
Ihle, Sebastian
Strüder, Lothar
Volz, Kerstin
Zweck, Josef
Soltau, Heike
Rosenauer, Andreas
Source :
Applied Physics Letters; 11/19/2012, Vol. 101 Issue 21, p212110-212110-4, 1p, 1 Chart, 2 Graphs
Publication Year :
2012

Abstract

A high-speed direct electron detection system is introduced to the field of transmission electron microscopy and applied to strain measurements in semiconductor nanostructures. In particular, a focused electron probe with a diameter of 0.5 nm was scanned over a fourfold quantum layer stack with alternating compressive and tensile strain and diffracted discs have been recorded on a scintillator-free direct electron detector with a frame time of 1 ms. We show that the applied algorithms can accurately detect Bragg beam positions despite a significant point spread each 300 kV electron causes during detection on the scintillator-free camera. For millisecond exposures, we find that strain can be measured with a precision of 1.3 × 10<superscript>-3</superscript>, enabling, e.g., strain mapping in a 100×100 nm<superscript>2</superscript> region with 0.5 nm resolution in 40 s. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
00036951
Volume :
101
Issue :
21
Database :
Complementary Index
Journal :
Applied Physics Letters
Publication Type :
Academic Journal
Accession number :
83557767
Full Text :
https://doi.org/10.1063/1.4767655