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Pulsed-laser deposited Pb(Zr0.52,Ti0.48)O3-on-silicon resonators with high-stopband rejection using feed-through cancellation.
- Source :
- Applied Physics Letters; 2/11/2013, Vol. 102 Issue 6, p063509, 4p, 3 Diagrams, 2 Charts, 2 Graphs
- Publication Year :
- 2013
-
Abstract
- A length extensional mode lead zirconate titanate (PZT)-on-Si resonator is presented using 50 Ω termination with high-stopband rejection exploiting feed-through cancellation. A 250-nm-thick (100)-dominant oriented PZT thin-film deposited on top of 3 μm Si using pulsed laser deposition has been used. The resonator is presented with the length of 40 μm (half-wavelength), which corresponds to a resonance frequency of about 83 MHz. The effect of feed-through cancellation has been studied to obtain high-stopband rejection using bottom electrode patterning in the presence of a specific grounding resistance. Using this technique, the stopband rejection can be improved by more than 20 dB. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 102
- Issue :
- 6
- Database :
- Complementary Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 85518977
- Full Text :
- https://doi.org/10.1063/1.4792739