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Atmospheric pressure micro plasma.
- Source :
- 2012 Abstracts IEEE International Conference on Plasma Science; 1/ 1/2012, p3P-63, 0p
- Publication Year :
- 2012
-
Abstract
- Generally, thermal doping method by furnace is used for solar-cell wafer doping. But it takes a lot of time and requires very expensive equipment. [ABSTRACT FROM PUBLISHER]
Details
- Language :
- English
- ISBNs :
- 9781457721274
- Database :
- Complementary Index
- Journal :
- 2012 Abstracts IEEE International Conference on Plasma Science
- Publication Type :
- Conference
- Accession number :
- 86521311
- Full Text :
- https://doi.org/10.1109/PLASMA.2012.6383848