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Impurities in Bulk A-Si:H, Silicon Nitride, and at the a-Si:H/Silicon Nitride Interface.

Authors :
Tsai, C. C.
Thompson, M. J.
Tuan, H. C.
Source :
MRS Online Proceedings Library; 01/02/1984, Vol. 33, pN.PAG-1, 1p
Publication Year :
1984

Details

Language :
English
ISSN :
19464274
Volume :
33
Database :
Complementary Index
Journal :
MRS Online Proceedings Library
Publication Type :
Conference
Accession number :
86831803
Full Text :
https://doi.org/10.1557/PROC-33-297
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