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Preparation of High-Quality a-SiGe:H films with Low Impurity Oncentration by the Hydrogen Dilution Method.

Authors :
Sayama, Katsunobu
Haku, Hisao
Dohjoh, Hiroshi
Isomura, Masao
Nakamura, Noboru
Tsuda, Shinya
Kishi, Yasuo
Nakano, Shouichi
Kuwano, Yukinori
Source :
MRS Online Proceedings Library; 01/01/1991, Vol. 219, pN.PAG-1, 1p
Publication Year :
1991

Details

Language :
English
ISSN :
19464274
Volume :
219
Database :
Complementary Index
Journal :
MRS Online Proceedings Library
Publication Type :
Conference
Accession number :
86843132
Full Text :
https://doi.org/10.1557/PROC-219-691