Back to Search Start Over

Photodefinable Benzocyclobutene Formulations for Thin Film Microelectronic Applications. III. 1 to 20 Micron Patterned Films.

Authors :
Moyer, E. S.
Becker, G. S.
Rutter, E. W.
Radler, M.
Bremmer, J. N.
Bernius, M. T.
Castillo, D.
Strandjord, A. J. G.
Heistand, R.
Foster, P.
Harris, R. F.
Source :
MRS Online Proceedings Library; 01/26/1993, Vol. 323, pN.PAG-1, 1p
Publication Year :
1993

Details

Language :
English
ISSN :
19464274
Volume :
323
Database :
Complementary Index
Journal :
MRS Online Proceedings Library
Publication Type :
Conference
Accession number :
86852298
Full Text :
https://doi.org/10.1557/PROC-323-267
Full Text Access
View/download PDF

Tools

Authors Abstract Subjects Details