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Suspended integration of pyrolytic carbon membrane on C-MEMS oral presentation.

Authors :
Xi, Shuang
Shi, Tielin
Long, Hu
Xu, Liangliang
Tang, Zirong
Source :
2013 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP); 2013, p1-4, 4p
Publication Year :
2013

Details

Language :
English
ISBNs :
9781467344777
Database :
Complementary Index
Journal :
2013 Symposium on Design, Test, Integration & Packaging of MEMS/MOEMS (DTIP)
Publication Type :
Conference
Accession number :
89793569

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