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Growth characteristics of chloride-based SiC epitaxial growth.

Authors :
Pedersen, H.
Leone, S.
Henry, A.
Lundskog, A.
Janzén, E.
Source :
Physica Status Solidi - Rapid Research Letters; 2008, Vol. 2 Issue 6, p278-280, 3p
Publication Year :
2008

Details

Language :
English
ISSN :
18626254
Volume :
2
Issue :
6
Database :
Complementary Index
Journal :
Physica Status Solidi - Rapid Research Letters
Publication Type :
Academic Journal
Accession number :
91053001
Full Text :
https://doi.org/10.1002/pssr.200802183