Subhalf-micron gate GaAs MESFET process using phase-shifting-mask technology.

Details

Language :

English

ISBNs :

9780780301962

Database :

Complementary Index

Journal :

1991 GaAs IC Symposium Technical Digest

Publication Type :

Conference

Accession number :

92071790

Full Text :

https://doi.org/10.1109/GAAS.1991.172692