Advanced methods for analysis of wafer-to-wafer yield variation.

Authors :: Pak, J.
Kittler, R.
Hopper, B.
Wen, P.
Source :: 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference & Workshop ASMC 97 Proceedings; 1997, p62-66, 5p
Publication Year :: 1997

Language :: English
ISBNs :: 9780780340503
Database :: Complementary Index
Journal :: 1997 IEEE/SEMI Advanced Semiconductor Manufacturing Conference & Workshop ASMC 97 Proceedings
Publication Type :: Conference
Accession number :: 92121622
Full Text :: https://doi.org/10.1109/ASMC.1997.630707