Investigation of KOH anisotropic etching of Si <100> wafers for improving etched surface quality.

Details

Language :

English

ISBNs :

9780780343061

Database :

Complementary Index

Journal :

1998 5th International Conference on Solid-State & Integrated Circuit Technology Proceedings (Cat No98EX105)

Publication Type :

Conference

Accession number :

92123417

Full Text :

https://doi.org/10.1109/ICSICT.1998.785819