Two-dimensional CVD profile simulator based on ballistic transport and reaction model.

Details

Language :

English

ISBNs :

9780780343696

Database :

Complementary Index

Journal :

1998 Sixth International Workshop on Computational Electronics Extended Abstracts (Cat No98EX116)

Publication Type :

Conference

Accession number :

92130237

Full Text :

https://doi.org/10.1109/IWCE.1998.742744