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The effects of preparation conditions of SIMOX samples on the photoluminescence spectra of their buried oxide layer.
- Source :
- 1999 IEEE International SOI Conference Proceedings (Cat No99CH36345); 1999, p127-128, 2p
- Publication Year :
- 1999
Details
- Language :
- English
- ISBNs :
- 9780780354562
- Database :
- Complementary Index
- Journal :
- 1999 IEEE International SOI Conference Proceedings (Cat No99CH36345)
- Publication Type :
- Conference
- Accession number :
- 92135751
- Full Text :
- https://doi.org/10.1109/SOI.1999.819885