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Direct measurement of localized joule heating in silicon devices by means of newly developed high resolution IR microscopy.

Authors :
Yasuda, A.
Yamaguchi, H.
Tanabe, Y.
Owada, N.
Hirasawa, S.
Source :
29th Annual Proceedings Reliability Physics 1991; 1991, p245-249, 5p
Publication Year :
1991

Details

Language :
English
ISBNs :
9780879426804
Database :
Complementary Index
Journal :
29th Annual Proceedings Reliability Physics 1991
Publication Type :
Conference
Accession number :
92145605
Full Text :
https://doi.org/10.1109/RELPHY.1991.146022