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Silicon on aluminum nitride structures formed by wafer bonding.
- Source :
- Proceedings IEEE International SOI Conference; 1994, p35-36, 2p
- Publication Year :
- 1994
Details
- Language :
- English
- ISBNs :
- 9780780324060
- Database :
- Complementary Index
- Journal :
- Proceedings IEEE International SOI Conference
- Publication Type :
- Conference
- Accession number :
- 92246026
- Full Text :
- https://doi.org/10.1109/SOI.1994.514222