Back to Search
Start Over
Silicon angular resonance gyroscope by deep ICPRIE and XeF/sub 2/ gas etching.
- Source :
- Proceedings MEMS 98 IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines & Systems (Cat No98CH36176; 1998, p322-327, 6p
- Publication Year :
- 1998
Details
- Language :
- English
- ISBNs :
- 9780780344129
- Database :
- Complementary Index
- Journal :
- Proceedings MEMS 98 IEEE Eleventh Annual International Workshop on Micro Electro Mechanical Systems An Investigation of Micro Structures, Sensors, Actuators, Machines & Systems (Cat No98CH36176
- Publication Type :
- Conference
- Accession number :
- 92253107
- Full Text :
- https://doi.org/10.1109/MEMSYS.1998.659776