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Hydrogen denudation for enhanced thin oxide quality, device performance, and potential epitaxial elimination.
- Source :
- Proceedings of 1994 VLSI Technology Symposium; 1994, p111-112, 2p
- Publication Year :
- 1994
Details
- Language :
- English
- ISBNs :
- 9780780319219
- Database :
- Complementary Index
- Journal :
- Proceedings of 1994 VLSI Technology Symposium
- Publication Type :
- Conference
- Accession number :
- 92271691
- Full Text :
- https://doi.org/10.1109/VLSIT.1994.324430