Anisotropic etching of silicon in (CH/sub 3/)/sub 4/NOH solutions.

MLA

Tabata, O., et al. “Anisotropic Etching of Silicon in (CH/Sub 3/)/Sub 4/NOH Solutions.” TRANSDUCERS ’91: 1991 International Conference on Solid-State Sensors & Actuators Digest of Technical Papers, Jan. 1991, pp. 811–14. EBSCOhost, https://doi.org/10.1109/SENSOR.1991.149007.

APA

Tabata, O., Asahi, R., Funabashi, H., & Sugiyama, S. (1991). Anisotropic etching of silicon in (CH/sub 3/)/sub 4/NOH solutions. TRANSDUCERS ’91: 1991 International Conference on Solid-State Sensors & Actuators Digest of Technical Papers, 811–814. https://doi.org/10.1109/SENSOR.1991.149007

Chicago

Tabata, O., R. Asahi, H. Funabashi, and S. Sugiyama. 1991. “Anisotropic Etching of Silicon in (CH/Sub 3/)/Sub 4/NOH Solutions.” TRANSDUCERS ’91: 1991 International Conference on Solid-State Sensors & Actuators Digest of Technical Papers, January, 811–14. doi:10.1109/SENSOR.1991.149007.