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Submicron MOS VLSI process technologies.
- Source :
- 1983 International Electron Devices Meeting; 1983, p19-22, 4p
- Publication Year :
- 1983
Details
- Language :
- English
- Database :
- Complementary Index
- Journal :
- 1983 International Electron Devices Meeting
- Publication Type :
- Conference
- Accession number :
- 92384412
- Full Text :
- https://doi.org/10.1109/IEDM.1983.190430