Analysis of fluidic and mechanical motion in MEMS by using high speed X-ray micro-imaging techniques.

Details

Language :

English

ISBNs :

9780780338296

Issue :

1

Database :

Complementary Index

Journal :

Proceedings of International Solid State Sensors & Actuators Conference (Transducers '97)

Publication Type :

Conference

Accession number :

92449434

Full Text :

https://doi.org/10.1109/SENSOR.1997.613604