Integration of diamond-like carbon and AlN for acoustic wave devices.

Details

Language :

English

ISBNs :

9781467325233

Database :

Complementary Index

Journal :

2013 IEEE International Conference of Electron Devices & Solid-state Circuits

Publication Type :

Conference

Accession number :

92928127

Full Text :

https://doi.org/10.1109/EDSSC.2013.6628093