Scaling and optimization of high-density integrated Si-capacitors.

Authors :: Weinreich, Wenke
Seidel, Konrad
Rudolph, Matthias
Koch, Johannes
Paul, Jan
Riedel, Stefan
Sundqvist, Jonas
Steidel, Katja
Gutsch, Manuela
Beyer, Volkhard
Hohle, Christoph
Source :: 2013 International Semiconductor Conference Dresden - Grenoble (ISCDG); 2013, p1-4, 4p
Publication Year :: 2013

Language :: English
ISBNs :: 9781479912513
Database :: Complementary Index
Journal :: 2013 International Semiconductor Conference Dresden - Grenoble (ISCDG)
Publication Type :: Conference
Accession number :: 92937954
Full Text :: https://doi.org/10.1109/ISCDG.2013.6656306