Effect of Internal Antenna Coil Power on the Plasma Parameters in 13.56 MHz/60 MHz Dual-Frequency Sputtering.

Details

Language :

English

ISSN :

10090630

Volume :

15

Issue :

12

Database :

Complementary Index

Journal :

Plasma Science & Technology

Publication Type :

Academic Journal

Accession number :

94295327

Full Text :

https://doi.org/10.1088/1009-0630/15/12/07