A static capacitance probe structure for resolving the sidewall skew angle of Silicon Deep Reactive-Ion Etching.

Details

Language :

English

ISBNs :

9781479935093

Database :

Complementary Index

Journal :

2014 IEEE 27th International Conference on Micro Electro Mechanical Systems (MEMS)

Publication Type :

Conference

Accession number :

95486069

Full Text :

https://doi.org/10.1109/MEMSYS.2014.6765567