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H2S Sensing Properties of R.F. Sputtered NiO Thin Films.
- Source :
- AIP Conference Proceedings; 2014, Vol. 1591, p938-940, 3p, 5 Graphs
- Publication Year :
- 2014
-
Abstract
- NiO thin films prepared by RF sputtering have been investigated for possible gas sensing application. The sensor films having thickness of around 30 nm were extremely smooth exhibiting a surface roughness of ~0.7 Å. These films exhibited a highly sensitive and selective response towards H<subscript>2</subscript>S at an operating temperature of 300°C. [ABSTRACT FROM AUTHOR]
Details
- Language :
- English
- ISSN :
- 0094243X
- Volume :
- 1591
- Database :
- Complementary Index
- Journal :
- AIP Conference Proceedings
- Publication Type :
- Conference
- Accession number :
- 95776247
- Full Text :
- https://doi.org/10.1063/1.4872809