Silicon-Microtube Scaffold Decorated with Anatase TiO2 as a Negative Electrode for a 3D Litium-Ion Microbattery.

An optimized scaffold based on silicon microtubes is designed to increase the surface capacity of 3D lithium-ion microbatteries. High-depth, mechanically robust microstructures are fabricated using microelectronic facilities. Conformal deposition of anatase TiO₂ is achieved using atomic layer deposition, realizing the targeted improvement for microbatteries; a surface capacity of 0.2 mA h cm^-2 at a charge rate of C/10 is obtained in standard liquid electrolyte. This work paves the way for the fabrication of solid-state 3D Li-ion microbatteries with an efficient 3D scaffold. [ABSTRACT FROM AUTHOR]