HYDROGENATED AMORPHOUS CARBON (a-C:H) THIN FILMS DOPED WITH FLUORINE ATOMS: CORRELATION BETWEEN COMPOSITION AND MECHANICAL PROPERTIES.

Authors :: LAVOUTE, J. P.
KILMAN, L.
JAOUL, C.
TRISTANT, P.
DUBLANCHE-TIXIER, C.
COLAS, M.
LABORDE, E.
MEUNIER, F.
JARRY, O.
Source :: Proceedings of Francophone Conference on Multidisciplinary Materials, Environment & Electronics (PLUMEE); 2013, Vol. 3 Issue 1, p129-133, 5p
Publication Year :: 2013
Abstract: The objective of this study is to increase the wear resistance of hydrogenated amorphous carbon (a-C:H) thin films obtained by PECVD in an industrial reactor. A way of improvement is to incorporate dopants such as fluorine to reduce the coefficient of friction. The physico-chemical properties of various coatings doped with fluorine atoms are studied and special attention was paid to their mechanical properties and their structures. [ABSTRACT FROM AUTHOR]

Subjects :: PLASMA-enhanced chemical vapor deposition
THIN film research
DOPING agents (Chemistry)
CHEMICAL reactors
BATCH reactors

Language :: French
ISSN :: 23439092
Volume :: 3
Issue :: 1
Database :: Complementary Index
Journal :: Proceedings of Francophone Conference on Multidisciplinary Materials, Environment & Electronics (PLUMEE)
Publication Type :: Conference
Accession number :: 97185248

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