Microplasma Logic Gates.

This paper demonstrates for the first time the use of microplasma to perform AND, OR, and XOR logic operations. The logic circuits are implemented similar to diode-resistor logic. Output voltages are in the range of \(5-40\) V and can be modified by varying the load resistor. The active area of the microplasma device is just \(50~\mu \) m \(\times 5~\mu \) m. The small interelectrode gap kept breakdown voltage to \(\sim 250\) V when operated in He gas at atmospheric pressure. The use of plasma as a source of free carriers is also demonstrated, with free carriers available up to 500- \(\mu \) m away from plasma. [ABSTRACT FROM PUBLISHER]