A capacitive differential pressure sensor with polyimide diaphragm.

Details

Language :

English

ISSN :

13616439

Volume :

7

Issue :

3

Database :

Complementary Index

Journal :

Journal of Micromechanics & Microengineering

Publication Type :

Academic Journal

Accession number :

98004830

Full Text :

https://doi.org/10.1088/0960-1317/7/3/046