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In situ preparation of Y-Ba-Cu-O superconducting thin films by magnetron sputtering.
- Source :
- Applied Physics Letters; 3/28/1988, Vol. 52 Issue 13, p1098, 3p
- Publication Year :
- 1988
-
Abstract
- Thin superconducting films of YBa2 Cu3 O7 have been prepared by magnetron sputtering from targets of sintered material in an oxygen-argon atmosphere. The compositional and structural properties were studied by Rutherford backscattering and x-ray diffraction. The films were deposited at substrate temperatures between 580 and 800 °C. It was found that the material grows in the oxygen deficient tetragonal phase. In situ heat treatment at 430 °C in pure O2 atmosphere generates the orthorhombic structure and the films on sapphire and SrTiO3 coated sapphire substrates show the full superconducting transition at 83 K. [ABSTRACT FROM AUTHOR]
- Subjects :
- THIN films
SUPERCONDUCTORS
YTTRIUM
BARIUM
COPPER
Subjects
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 52
- Issue :
- 13
- Database :
- Complementary Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 9826346
- Full Text :
- https://doi.org/10.1063/1.99222