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Laser-driven chemical vapor deposition of platinum at atmospheric pressure and room temperature from CpPt(CH3)3.
- Source :
- Applied Physics Letters; 10/31/1988, Vol. 53 Issue 18, p1705, 3p
- Publication Year :
- 1988
-
Abstract
- Photolysis of CpPt(Me)3(Cp=η5-C5H5, Me=CH3) at room temperature and atmospheric pressure produces thin films and patterned structures of platinum metal on solid substrates. The platinum films are characterized by Auger electron spectroscopy, x-ray diffraction, and scanning electron microscopy. Substrates can also be prepatterned by laser irradiation and then developed into a shiny platinum deposit at a later time. [ABSTRACT FROM AUTHOR]
- Subjects :
- PLATINUM
CHEMICAL vapor deposition
THIN films
Subjects
Details
- Language :
- English
- ISSN :
- 00036951
- Volume :
- 53
- Issue :
- 18
- Database :
- Complementary Index
- Journal :
- Applied Physics Letters
- Publication Type :
- Academic Journal
- Accession number :
- 9828646
- Full Text :
- https://doi.org/10.1063/1.100472