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Laser-driven chemical vapor deposition of platinum at atmospheric pressure and room temperature from CpPt(CH3)3.

Authors :
Koplitz, Lynn Vogel
Shuh, David K.
Chen, Y.-J.
Williams, R. Stanley
Zink, Jeffrey I.
Source :
Applied Physics Letters; 10/31/1988, Vol. 53 Issue 18, p1705, 3p
Publication Year :
1988

Abstract

Photolysis of CpPt(Me)3(Cp=η5-C5H5, Me=CH3) at room temperature and atmospheric pressure produces thin films and patterned structures of platinum metal on solid substrates. The platinum films are characterized by Auger electron spectroscopy, x-ray diffraction, and scanning electron microscopy. Substrates can also be prepatterned by laser irradiation and then developed into a shiny platinum deposit at a later time. [ABSTRACT FROM AUTHOR]

Details

Language :
English
ISSN :
00036951
Volume :
53
Issue :
18
Database :
Complementary Index
Journal :
Applied Physics Letters
Publication Type :
Academic Journal
Accession number :
9828646
Full Text :
https://doi.org/10.1063/1.100472