Effects of etch stop layer deposition conditions on stress stabilities in amorphous In-Ga-Zn-O thin film transistors.

Details

Language :

English

ISBNs :

9784863483965

Database :

Complementary Index

Journal :

2014 21st International Workshop on Active-Matrix Flatpanel Displays & Devices (AM-FPD)

Publication Type :

Conference

Accession number :

98436625

Full Text :

https://doi.org/10.1109/AM-FPD.2014.6867151