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ALD ZrO2 processes for BEoL device applications.
- Source :
- 2014 IEEE International Conference on IC Design & Technology; 2014, p1-4, 4p
- Publication Year :
- 2014
Details
- Language :
- English
- ISBNs :
- 9781479921539
- Database :
- Complementary Index
- Journal :
- 2014 IEEE International Conference on IC Design & Technology
- Publication Type :
- Conference
- Accession number :
- 98450547
- Full Text :
- https://doi.org/10.1109/ICICDT.2014.6838604