Studies on Comparison of Particle Concentration Models for Cleanroom.

Many independent reports have indicated that cleanroom supply airflow rates are often over-designed to meet the air cleanliness classes, over-supply can cause significant energy waste. It is of great significance to find a more reliable model which can be used to calculate the required air change rate based on a cleanliness class. This paper analyzes 4 well-recognized international particle concentration models for cleanrooms based on uniform distribution of particles, mass airflow balance and indoor particle conservation. This study evaluates the models in perspectives of their assumptions, considered parameters, and application limitations. An improved model is further proposed with examples. The research outcomes can provide a good theoretical support for energy-efficient cleanroom study and design. [ABSTRACT FROM AUTHOR]