Synthesis of Doped, Ternary, and Quaternary Materials by Atomic Layer Deposition: A Review.

Details

Language :

English

ISSN :

08974756

Volume :

31

Issue :

4

Database :

Supplemental Index

Journal :

Chemistry of Materials

Publication Type :

Academic Journal

Accession number :

144956538

Full Text :

https://doi.org/10.1021/acs.chemmater.8b02878