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Suspended Graphene Membranes with Attached Silicon Proof Masses as Piezoresistive Nanoelectromechanical Systems Accelerometers.
- Source :
- Nano Letters; Oct2019, Vol. 19 Issue 10, p6788-6799, 12p
- Publication Year :
- 2019
Details
- Language :
- English
- ISSN :
- 15306984
- Volume :
- 19
- Issue :
- 10
- Database :
- Supplemental Index
- Journal :
- Nano Letters
- Publication Type :
- Academic Journal
- Accession number :
- 145010645
- Full Text :
- https://doi.org/10.1021/acs.nanolett.9b01759