Low-Temperature Growth of Ferroelectric Hf0.5Zr0.5O2 Thin Films Assisted by Deep Ultraviolet Light Irradiation.

Details

Language :

English

ISSN :

26376113

Volume :

3

Issue :

3

Database :

Supplemental Index

Journal :

ACS Applied Electronic Materials

Publication Type :

Academic Journal

Accession number :

149468676

Full Text :

https://doi.org/10.1021/acsaelm.0c01065