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High-Mobility MOCVD β‑Ga2O3 Epitaxy with Fast Growth Rate Using Trimethylgallium.

Authors :
Meng, Lingyu
Feng, Zixuan
Bhuiyan, A F M Anhar Uddin
Zhao, Hongping
Source :
Crystal Growth & Design; 6/1/2022, Vol. 22 Issue 6, p3896-3904, 9p
Publication Year :
2022

Details

Language :
English
ISSN :
15287483
Volume :
22
Issue :
6
Database :
Supplemental Index
Journal :
Crystal Growth & Design
Publication Type :
Academic Journal
Accession number :
157214468
Full Text :
https://doi.org/10.1021/acs.cgd.2c00290