TRAPS.

This article will focus on traps in the dielectric. Traps are the defects, which can capture mobile charge carriers, in the dielectric. In microelectronic devices, traps appear in the bulk of dielectric, at the dielectric/semiconductor interface and within semiconductors. For the modem semiconductor industry, silicon dioxide and silicon are the most widely used dielectric and semiconductor, respectively. This article concentrates on the trap in the silicon dioxide prepared on silicon. There are two types of traps, acceptor-like and donor-like. The acceptor-like trap can capture electrons and form negative space charges.