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Ferroelectricity in Ultrathin HfO2‑Based Films by Nanosecond Laser Annealing.

Authors :
Athle, Robin
Hill, Megan O
Irish, Austin
Chen, Huaiyu
Timm, Rainer
Kristensson, Elias
Wallentin, Jesper
Borg, Mattias
Source :
ACS Applied Materials & Interfaces; 10/16/2024, Vol. 16 Issue 41, p55684-55692, 9p
Publication Year :
2024

Details

Language :
English
ISSN :
19448244
Volume :
16
Issue :
41
Database :
Supplemental Index
Journal :
ACS Applied Materials & Interfaces
Publication Type :
Academic Journal
Accession number :
180328058
Full Text :
https://doi.org/10.1021/acsami.4c10002