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Erratum: Role of Surfactant Molecules in Post-CMP Cleaning [J. Electrochem. Soc., 155, H64 (2008)1.
- Source :
- Journal of The Electrochemical Society; 2009, Vol. 156 Issue 2, pS2-S2, 1p, 1 Diagram
- Publication Year :
- 2009
-
Abstract
- A correction to the article "Role of Surfactant Molecules in Post-CMP Cleaning" that was published in a previous issue is presented.
- Subjects :
- SURFACE active agents
Subjects
Details
- Language :
- English
- ISSN :
- 00134651
- Volume :
- 156
- Issue :
- 2
- Database :
- Supplemental Index
- Journal :
- Journal of The Electrochemical Society
- Publication Type :
- Academic Journal
- Accession number :
- 36485297
- Full Text :
- https://doi.org/10.1149/1.3046538